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1978 - 1982
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Description of the invention Pashchenko S. E., Semenov A. G., K. P. Kutsenogii Microanalyzer N 758846 30.03.1982 Institute of Chemical Kinetics and Combustion The formula of the invention
S. ;. Pashchenko
Semenov A. G.
K. P. Kutsenogii
Description of the invention Pashchenko S. E., Semenov A. G., K. P. Kutsenogii Microanalyzer N 758846 30.03.1982 Institute of Chemical Kinetics and Combustion The formula of the invention 1. Microanalyzer containing electron-optical system for formation of the electron probe, sample holder, the system will generate an image of the sample, the auger spectrometer comprising an analyzer with coaxial cylinders, the inner of which is formed of a slot for transmission auger electrons, means for detecting auger electrons, and registration system, characterized in that for the purpose of increasing the accuracy and sensitivity analysis, and enhanced functionality, the sample holder is installed in the cavity of the cylinder of the analyzer, which are provided with holes for the primary passage and passing through the sample the electron beam and the build system image installed on the path passing through the sample the electron beam. 2. Microanalyzer under item 1, characterized in that the slits on the inner cylindre analyzer auger spectrometer in the form of two systems, the sample holder is mounted symmetrically between the systems of the slits, and means for detecting Auger electrons comprises two detectors, each associated with one of the systems of the slits in the inner cylinder of the analyzer.